The mini CORI-FLOW Ex d Coriolis mass flow meter offers integrated PID control for direct control of valves or pumps, thus constituting compact Coriolis mass flow control loops. This flow meter can also come with valves or pumps for use in Zone 1, but they must install outside the mini CORI-FLOW Ex d box and connect via the screw terminal.
- direct mass flow measurement
- fast response time
- high accuracy (0.2% Rd + ZS for liquids, 0.5% Rd + ZS for gases)
- highly stable
- compact Coriolis controller
- all wetted parts stainless steel; optional: Hastelloy-C22
- explosion-proof housing for use in IECEx and ATEX Zone 1 rating hazardous areas
- IP65 housing
- analog plus digital communication
- integrated PID controller for control valve or pump
- integrated totalizer for batch control
Coriolis Flow Measurement Principle
The mini CORI-FLOW Ex d Series Coriolis low flow meters and controllers contain a uniquely shaped, single loop sensor tube, forming part of an oscillating system. When a fluid flows through the tube, Coriolis forces cause a variable phase shift, which is detected by sensors and fed into the integrally mounted pc-board. The resulting output signal is strictly proportional to the real mass flow rate. Coriolis mass flow measurement is fast, accurate, and inherently bi-directional. The mini CORI-FLOW Ex d features density and temperature of the fluid as secondary outputs.
Applications
- Semiconductor Manufacturing
- mass flow measurement and control of ultra low flow gas and liquid flows in wafer processing, etching, and deposition processes
- critical fluid control in cleanroom environments
- Food, Beverage, and Pharmaceutical Production
- accurate mass dosing of flavors, sweeteners, vitamins, or preservatives at very low flow rates
- ensuring consistent, repeatable product quality and taste
- controlled delivery of active ingredients, solvents, and reagents in batch processes
- environments where solvent vapors pose a risk of ignition or explosion
- Chemicals and Petrochemical Plants
- precise dosing of catalysts, additives, and inhibitors in chemical processing
- flow measurement in processes with hazardous or flammable fluids
- controlled injection of odorant compounds into natural gas streams for safety and regulatory compliance, for example, THT dosing
- Laboratories, Research, and Pilot Plants
- development and testing of new processes with small-scale flow control
- precise flow measurement in research involving hazardous chemicals or gases
- monitoring supercritical CO2 extraction flows, solvent dosing, or other anallytical processes where mass accuracy is crucial
Models of the mini CORI-FLOW Ex d Series
| Model ID | Liquid Flow Range | Gas Flow Range | Full Scale (FS) Value | Pressure Rating |
|---|---|---|---|---|
| XM12 | 0-200 g/h (nominal flow rate: 100 g/h) | 0-2.66 ln/min (N2) | User Configurable: 5-200 g/h | 138 bar(g) |
| XM13 | 0-2,000 g/h (nominal flow rate: 1,000 g/h) | 0-26.6 ln/min (N2) | User Configurable: 50-2,000 g/h | 138 bar(g) |
| XM14 | 0-30 kg/h (nominal flow rate: 10 kg/h) | 0-400 ln/min (N2) | User Configurable: 1-30 kg/h | 107 bar(g) |
Configuration Options: Protocol and Valve
| Part Number Extension | Configuration | Additional Protocol | Control Valve |
|---|---|---|---|
| A | RS-232, Analog I/O | – | Normally Closed |
| B | RS-232, Analog I/O | – | Normally Open |
| D | RS-232, Analog I/O | DeviceNet | Normally Closed |
| E | RS-232, Analog I/O | DeviceNet | Normally Open |
| M | RS-232, Analog I/O | Modbus | Normally Closed |
| N | RS-232, Analog I/O | Modbus | Normally Open |
| P | RS-232, Analog I/O | PROFIBUS-DP | Normally Closed |
| Q | RS-232, Analog I/O | PROFIBUS-DP | Normally Open |
| R | RS-232, Analog I/O | FLOW-BUS | Normally Closed |
| S | RS-232, Analog I/O | FLOW-BUS | Normally Open |
| X* | RS-232, Analog I/O | Additional Analog I/O | Normally Closed |
| Y* | RS-232, Analog I/O | Additional Analog I/O | Normally Open |
| *Not available for purchase on the web store; please contact us for ordering assistance. | |||
Configuration Options: Output / Setpoint
| Part Number Extension | Output / Setpoint |
|---|---|
| A | 0-5 V / 0-5 V or digital: 0-100% |
| B | 0-10 V / 0-10 V or digital: 0-100% |
| F | 0-20 mA sourcing / 0-20 mA or digital: 0-100% |
| G | 4-20 mA sourcing / 4-20 mA or digital: 0-100% |
Product Documents
Data Sheets
Certifications